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Titel: System-Level Simulation of MEMS by Means of Model Order Reduction
Autoren: Bechtold, Tamara
Stichwörter: modeling
Erscheinungsdatum: Apr-2015
Zusammenfassung: The rapid progress in microelectromechanical systems (MEMS) and the evolution from a limited set of well-established applications, examples, in automotive industry, print heads, and digital light projection, to other fields mainly driven by consumer applications opens a new market for these devices. It simultaneously creates the need for fast, efficient, and adequate design and optimization tools not only for stand-alone devices, but also for entire multiphysics microsystems comprising the MEMS component, the attached control and read-out circuitry and the package, while additionally considering environmental impacts potentially affecting the system functionality.
Enthalten in den Sammlungen:7) Simulationen - Model-based Design of Systems

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